Monolithic Ceramic Technology for Sensing Devices

We present a multilayer co-fired ceramic technology for the development of alumina-based gas sensors substrates. These substrates include embedded heater and thermo-resistance as well as electrodes in a 2times2 mm dice. Substrate thickness is less than 0.2 mm. The substrate technology allows obtaining smooth surface at the nanometer scale. As an example of application, we have studied the growth of nanowires on the presented structure to take advantage of nanoscale phenomena.