A piezo-resistive resonant MEMS amplifier

A MEMS resonator using electrostatic to piezo-resistive transduction is demonstrated to be capable of simultaneous signal filtering and amplification. The mechanical resonance serves as a high Q electrical filter, while the piezo-resistive readout allows for signal amplification. Amplification factors up to 4.6 dB and Q values up to 60,000 are obtained for a 15 MHz resonator.