GaN-based natural super junction diodes with multi-channel structures

We propose a new breakdown mechanism of GaN-based electron devices called ldquonatural super junctionrdquo. The junction model is supported by device simulations and experiments for newly developed multi-channel diodes with a dual-recessed structure. Based on the model, the on-resistance of the diodes can be reduced keeping high breakdown voltages. The fabricated diode achieves extremely high breakdown voltage of 9300 V with low on-state resistance RonA of 176 mOmegacm
²
, which is the record low value for GaN-based SBDs with the breakdown voltage over 9000 V.