Piezoelectric films in silicon-based microactuation structures

We have established a process for the deposition of multi-micron piezoelectric films which is compatible with fabrication of micro-mechanical actuator structures, and have fabricated such actuators, and demonstrated their operation. While some of these accomplishments have been reported by other groups, we know of none that have achieved all of them in an integrated fabrication process. However, considerable work is still required to optimise the material performance and fabrication processes, as well as to investigate specific applications.