Fabrication and Characterization of Proton-Exchanged Waveguide on X-Cut LiNbO3

In this letter, we report proton-exchanged (PE) slab and channel waveguides fabricated on x-cut lithium niobate. The thickness and the optical constants as well as the composition profiles of the PE films at different PE hours are measured using prism coupling technique and secondary ion mass spectroscopy method. Planar and channel waveguide structures are characterized and an 8 times 8 square array of air holes on PE LiNbO
₃
waveguide is demonstrated using focused ion beam.