Efficient Design Methodology of RF-MEMS based Tuner

This paper describes a design methodology specifically developed for RF-MEMS based tuner, which translates into optimal performances in terms of both impedance coverage of the Smith Chart and |Gamma
_MAX
| value. The design methodology is moreover associated with an RF-MEMS technology developed for medium power (in the watt range) applications and exhibiting a design robustness regarding the capacitive RF-MEMS contact quality. A tuner has been designed thanks to this efficient procedure, fabricated and measured. The circuit exhibits excellent measured RF-performances: a wide impedance coverage is reached from the first test with a value of |Gamma
_MAX
| of 0.82 at 14 GHz.