Optical MEMS electrostatic actuators with various beam configurations

The electro statically actuated clamped-clamped beam and cantilever beam with ground electrodes have been simulated using finite element method (FEM) and presented in this paper. The performance analysis of both MEMS actuators have been carried out and the pull in voltages for different dimensions of the beams were estimated. The beam structural displacements, the natural frequencies for the dominant modes and the corresponding eigen values have been evaluated for different bias voltages. The results obtained show that pull in voltages can be varied from 2348V to 772V and the natural frequencies from 102.92 KHz to 916.35 KHz by varying the length and width of the beams.