Science and technology of piezoelectric/diamond heterostructures for monolithically integrated high performance MEMS/NEMS/CMOS devices

This paper describes the fundamental and applied science performed to integrate piezoelectric PbZr
_x
Ti
_1-x
O
₃
and AlN films with a novel mechanically robust ultrananocrystalline diamond layer to enable a new generation of low voltage / high-performance piezoactuated hybrid piezoelectric/diamond MEMS/NEMS devices.