Integration of terahertz quantum cascade lasers with lithographically micromachined waveguides

Gold rectangular waveguides suitable for single mode operation at frequencies near 3 THz have been micromachined using silicon microfabrication methods. The design, fabrication, and loss characteristics of these waveguides will be presented. On-chip integration of these waveguide structures with THz quantum cascade laser (QCL) sources has been achieved and the characteristics of QCL beams guided by waveguide will be discussed.