A room temperature NbN bolometer for terahertz detection

Using RF magnetron sputtering and electronic beam lithography, a NbN microbolometer integrated with a planar logarithm periodic antenna is fabricated on a SiO
₂
/Si (100) substrate for detecting signals from 0.05 THz to 0.4 THz. The best attainable responsivity of the device is about 100 volts per watt at 300 K.