De-embedding of lumped-element characteristics with the aid of EM analysis

We have proposed de-embedding method with the aid of EM analysis. A hybrid S/Z-parameters are used for a four-port parasitic circuit. The higher accuracy of the proposed method, within 4%, is validated via EM simulation than that of conventional method using open/short-TEG, more than 10%. Verification of the proposed method by experiment is the future task.