Interface circuit for capacitive microaccelerometer

This paper reports an interface circuit that provides an interface from capacitive MEMS sensors to other signal processing circuits. The interface circuit designed specially for capacitive accelerometer and gyroscopes applications is implemented in 0.35-mum 2P-4M CMOS process and measurement results that indicate the interface circuit resolves 7.3 aF of capacitance with a 1 MHz sampling rate and has a rough noise floor of 0.2 aF/Hz@1 KHz at ambient atmosphere are presented.