Surface-normal fano filters based on transferred silicon nanomembranes on glass substrates

We report here the design and experimental results on surface-normal optical filters based on Fano resonance in patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent glass substrates using a disruptive SiNM wet transfer process. The measured filter transmission results agree well with the design. Further design and process optimizations can lead to high Q filters, suitable for ultra-compact surface normal filters, switches and modulators.