Superconducting Properties of YBa2Cu3O7-x Films Prepared by ECR Plasma-Assisted Sputtering

Using ECR plasma-assisted ing,¬ YBa
2
Cu
3
O
7-x
films with c-axis orientation were grown epitaxially on (100) SrTiO
3
substrates. YBa
2
Cu
3
O
7-x
films prepared by ECR plasma-assisted sputtering had a smaller lattice constant c and a higher Tc than films prepared by magnetron sputtering alone. Optical emisssion spectroscopy measurements were performed during deposition to investigate the relationship between the superconducting properties of films and the plasma species in the ECR plasma. The film superconducting properties were closely related to the activated particles of oxygen in the ECR plasma.