Co-Cr Perpendicular Anisotropy Film Deposited by Evaporation with Ion Bombardment

The effect of ion bombardment during film growth was investigated for perpendicular anisotropy CoCr films. Films were prepared by a web-coater type evaporating system equipped with a Kaufman 3-cm ion source. The M
_s
, H
_{c ⊥}
and δθ
₅₀
decreased, while H
_{k/spl pert/}
and the grain size increased, in bombarded films. These results indicate a reduction in crystallographic defects and Cr segregation, suggesting that grain boundaries play an important role in the segregation.