Single-Chip CMOS Analog Sensor-Conditioning ICs with Integrated Electrically-Adjustable Passive Resistors

We demonstrate single-chip analog sensor-conditioning with integrated electrically-adjustable passive resistors, allowing adjustment by the sensor-system assembler, without the drawbacks of digital conditioning. Adding a rudimentary bulk-silicon cavity-etch to a standard 1mum CMOS process enables a group of innovations for thermally-isolated adjustable resistors, called Rejustors
^TM
.