A 1.5μW 1V 2nd-Order ΔΣ Sensor Front-End with Signal Boosting and Offset Compensation for a Capacitive 3-Axis Micro-Accelerometer

The paper presents a DeltaSigma sensor for a capacitive micro-accelemeter. The prototype was fabricated with a 0.25 mum CMOS technology with MIM capacitors. The silicon area of the front-end is 0.49 mm
²
. The chip was combined with an external plusmn2g capacitive 3-axis accelerometer on a PCB.This DeltaSigma sensor front-end IC draws 1.5 muA from a 1V supply while sampling three proof masses, each at 4.096 kS/s.