On-Chip High Voltage Generation With standard process for MEMS

In this paper, a fully integrated CMOS on-chip high voltage generation circuit based on charge pump circuits is presented. This high voltage circuit is composed of a hybrid charge pump. It can therefore provide the highest output voltage tolerated by the technology used, which cannot be reached by each individual charge pump. Moreover, the circuit is optimized not only to have a compact structure but also to be realized with only low-voltage transistors, thus a standard process. To make voltage conversion more efficient, the design is made to reduce charge loss to minimum.