The ROI of Metrology

The conventional premise that metrology is a "non-value-added necessary evil" is a misleading one, which must he viewed as obsolete thinking. Much of the metrology requirements are now key enablers to traditionally labeled "value-added" processing steps in lithography and etch, such that they can be considered integral parts of the processes. This paper will explore the present and future trends and challenges in CD metrology. However, equipment is only part of the battle. The quality application of these tools in a production environment is quite important; the ultimate value-added by metrology is a result of quality tools run by a quality metrology team using quality practices.