Nine-Element Lumped Metal-Insulator-Metal (MIM) Capacitor Model for RF Applications

In this paper we suggest using a nine element model to represent metal-insulator-metal (MIM) capacitors up to 20 GHz. The model suggested is a nine element pi circuit that includes interconnect resistance and inductance as well as substrate parasitics. This paper also identifies the procedures to extract the nine element lumped MIM capacitor model and to optimize the model to fit the measured data up to the self resonant frequency. A good fit between the modeled and measured effective capacitance and Q factor have been obtained in this work.