Reconfigurable filters using mems resonators and integrated optical microcavities

An in-plane silicon-on-insulator (SOI) MEMS-tunable Fabry-Perot microcavity filter is presented, in which one distributed Bragg reflector (DBR) mirror is attached to a doubly-clamped suspended beam resonator. We improve upon previous designs by utilizing a silicon waveguide cavity instead of an air cavity. The design eliminates a significant source of optical loss (beam divergence) leading to improved mirror bandwidth (>150nm) and Q-factor Q
_Optical
ap4,200). By keeping one DBR mirror fixed and displacing the second mirror, we change the effective cavity length and modify the Fabry-Perot resonances. Tuning over Deltalambdaap10 nm is measured using
in-plane
electrostatic actuation to displace the DBR. The application of the device as a sensor is also discussed.