A proposal of gyroscope sensor using asymmetrical comb drive actuator

We have analyzed an asymmetric comb-drive actuator as an angular rate sensor. In common comb-drive actuator, the movable and the fixed comb-electrodes are arranged one after the other with equally interval. In our model, on the other hand, the interval is not equally; one side-to-side comb-electrode gap is smaller than another one. We calculate electrical impedance at its mechanical resonance with Colioris' force and found that the asymmetric comb-drive actuator has good sensitivity in its electrical impedance change for angular rate. We also found that the impedance of a symmetric comb-drive actuator is not a function of Colioris' force in case of small deviation approximation.