45nm SOI CMOS Technology with 3X hole mobility enhancement and Asymmetric transistor for high performance CPU application

45nm SOI CMOS technology target for high performance CPU application is reported. Process induced strained CMOS demonstrates 1232/855 uA/um DC Ion at 100nA/um Ioff under Vdd=1V, which is the highest ever reported performance at 45nm ground rule for both SOI and bulk technology. Small width PFET reaches record high 975uA/um. High SiGe over Si volume ratio in thin film SOI enables high compressive stress even at small device width and active area. Hole mobility is enhanced by 3X and Ion is increased 2X. On top of record high drive current, asymmetric transistor is implemented to further improve energy-delay by 20%. Our 45nm SOI technology offers industry leading performance in terms of speed, energy and density.