7F-1 Design of Band-Stop Filters Using PZT Layer On Silicon Substrate Phononic Crystals

The realization of a stop-band filter constituted by a periodically patterned PZT layer, polarized along thickness, on silicon substrate and interdigitated electrodes (IDE) for emission/reception of guided elastic waves, is investigated. The filter characteristics are theoretically evaluated by using finite element simulations: dispersion curves of patterned PZT layer are computed for a given pattern geometry to obtain the absolute band gap. Complete structure is then modelled, with appropriate IDE to propagate a guided mode in the piezoelectric layer. Finally, filtering capability of the structure is evaluated.