RF-Powder : Fabrication of 0.15-mm Si-powder resonating at microwave frequencies

Resonant circuits (LC tank circuit) were formed on 150μm-square silicon chips, which are consisted of a small spiral inductor and an MIM capacitor. The small inductor was fabricated by an X-ray lithography and Cu plating. Resonant characteristics in 2.5 GHz band were measured using a helical coil probe. Obtained resonant frequency and unload Q showed good agreement with designed and simulated ones. Miniaturization to a 150μm-chip showed a variety of probable applications on a sheet such as a paper.