Understanding the optimization of sub-45nm FinFET devices for ESD applications

ESD performance of advanced FinFETs shows a delicate sensitivity to device layout and to processing. Thermal issues are experimentally correlated to gate length, fin width, electrical operation mode and are investigated by TCAD simulation. S/D implant conditions, silicide blocking, and selective epitaxial growth are studied. Reasonable ESD performance is demonstrated while margins between success and failure seem to be very narrow.