Double well field effect diode: Lateral SCR-like device for ESD protection of I/Os in deep sub micron SOI

The double well field effect diode (DWFED), an SOI SCR-like device for ESD protection of I/O circuits, is presented. The effect of device and process parameters on the diode on-voltage is examined, and the TLP and VFTLP characteristics of the DWFED are compared with those of the SOI lateral diode. It is shown how to use the DWFED for local clamping ESD protection, with a diode-like It2 level.