Miniaturized Flexible Temperature Sensor

We realize a flexible temperature sensor based on a micropatterned thin-film platinum resistor. The sensor is situated at the end of a 100-mum-wide and 7-cm-long probe. The latter consists of a biocompatible high-temperature-resistant polyimide (U-Varnish-S, UBE Industries, Tokyo, Japan) in which the platinum resistor and the electrical contact leads are embedded. The sensor is operational from 0degC up to 400degC and has a time constant of less than 80 ms. Such a sensor can potentially be used to characterize the thermo-ablation process of tumors using hot steam injection via a microtube.