The Vibration and Control of Multi-Wire Saw

Starting from effects on machining quality that vibration acts on silicon wafer, we know the importance of the control of wire-vibration in wafer cutting. Based the analysis of the system, the paper builds up Hamiltom principle system models, and analyzes it with the finite element method. Different parameters on the natural frequency results are given. Finally, this paper presents the active control of wire-vibration and the fuzzy control. The paper gives the general setting about the system parameters and reaches anticipated results.