Experimental Hardware Calibrated Compact Models for 50nm n-channel FinFETs

An analytic potential DG model with quantum mechanical and short channel effects is calibrated to experimental n-channel FinFET data. All C-V and I-V curves from L=10 mum to 50 nm are in excellent agreement with a single mobility model. There is evidence suggesting higher than expected currents from very short fins possibly due to strain enhanced transport effects.