A Digitally Controlled Scanning Microprobe for Trace Element Analysis

A microprobe facility has been installed at the ETH-EN Tandem accelerator which is capable of focusing protons and heavy ions with a mass-energy product P ≤ 70 amu MeV/q
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(q = charge state) to a spot size of 10-30 μm
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. By means of a digitally controlled electrostatic system a proton beam of 3 MeV can be deflected in computer controlled patterns over a target area of 1.5×1.5 mm
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. The system can be used either for highly sensitive trace element analysis or for deep implantation of heavy ions.