Fabrication and Characterization of Silicon-Polymer Beam Structures for Cantilever-Type Tactile Sensors

Silicon-fluoropolymer beam structures for cantilever-type tactile sensors have been fabricated and characterized. Curvature shape and tip height of fabricated cantilever agree well with theoretical calculated results. The deposition condition of polymer layer has been optimized in terms of process yield and tip height. The optimal thickness and curing temperature are 4-5 μm and 200°C for 1.5 μm thick Si, respectively. The response of the tactile sensor with PDMS elastomer has been investigated against pressure. Although resistance of the platinum strain gauge has large temperature drift, it is obviously proportional to pressure, so that it becomes evident that the pressure can be detected by tactile sensor embedded in the elastomer.