A Novel Method of Fabricating Convoluted Shaped Electrode Arrays for Neural and Retinal Prosthesis

A novel fabrication technique has been developed for creating high density (7.7 electrodes/mm
²
), out of plane, high aspect ratio silicon-based convoluted microelectrode arrays for neural and retinal prosthesis. The unique convoluted shape of the electrodes compliments the curved surface of nerves, and in the case of retina, its spherical geometry. This electrode array's geometry has the potential to secure implantation in the nerve and to physically stabilize it against displacement after insertion. This report describes a novel method for de-insulation of the electrode tip and its limitations in terms of uniformity in tip de-insulation.