Frequency Transition Phenomenon of Self-Oscillated Micro-Cantilever by Changing Driving Voltage

We have found an interesting phenomenon of self-excited oscillation of electrostatic microcantilever; the device was found to be self-oscillated under an applied dc voltage, by repeating charge and discharge between the fixed and the movable electrodes. Oscillation frequency is changed by changing apply dc voltage. The phenomenon can be used to make a MEMS version of voltage-controlled oscillator (VCO) for constructing a simple voltage-controlled oscillator that is free from external inductors or capacitors.