Four-Cantilever Trace Explosive Sensors with Dual SAMs Functionalized for Specific-Sensing Improvement and Nonspecific-Adsorption Depression

A top-down formed four-cantilever micro-sensor structure is equipped with self-assembled dual monolayers on the surfaces for specific detection to trace explosive and depression of environmental cross-talk. Sensor design of the four-lever scheme, micro-fabrication, surface modification of the dual monolayers and experimental results for ultra-sensitive detection of explosive are sequentially related. The testing results confirm that the sensor can detect TNT at the resolution level of several tens of ppt and can effectively depress the influences from environmental temperature and humidity change.