Dynamic Pull-In and Switching for Sub-Pull-In Voltage Electrostatic Actuation

We propose and experimentally demonstrate a new MEMS switching technique using elastic potential energy to drive switching with electrostatic force used for switch control. This approach allows switching into pulled-in states at voltages significantly less than the quasi-static pull-in voltage. We have demonstrated switching into a pulled-in position using voltages much less than the pull-in voltage with a large torsional MEMS mirror, a high-speed torsional MEMS mirror, and a high-speed rectilinear MEMS switch that operates horizontally. Both high-speed devices have demonstrated switching in less than 500 ns over relatively large gaps.