Nano-Pattering on the Basis of Germanium Compositions Using Scanning Probe Microscopy

The possibility of formation of Ge-based nanowires with lateral resolution up to several nanometers using modification of GeO films by scanning probe microscope was demonstrated for the first time. The main advantage of used germanium monoxide films is its meta-stability and decomposition on Ge and GeO
₂
under impact of atomic force microscope probe.