Adaptive Friction Compensation Design for Submicrometer Positioning of High Precision Stage

This paper presents an adaptive friction compensation algorithm based on LuGre friction model with only measurements of position for a high precision stage using a synchronous piezoelectric device driver (SPIDER). Two observers are used to estimate an unmeasured friction state in LuGre model. Adaptive control laws are derived on the basis of the Lyapunov technique for estimating unknown friction parameters, and compensating friction force. Lyapunov's direct method is used to prove the robust global convergence of position tracking errors. Experimental results taken from SPIDER system confirm that the proposed control method achieved fine positioning with respect to friction behavior.