A New Equivalent Circuit Model of MIM Capacitor for RFIC

A new scalable Metal-Insulator-Metal (MIM) capacitor model is presented for RF (Radio Frequency) applications. Four MIM capacitors were fabricated in 0.13
μ
m CMOS technology. Using physical analysis based on the new model, parameter optimization and curve fitting, the scaling rules are given for all elements on the circuit model. The model fits very well with the measured data in the frequency range 500MHz-10.01GHz. The results show that the proposed model provides accurate results, while retaining the physical properties of every element in the model.