Evaluation of Plastic Film Thickness Measuring System Using an X-ray Slit Beam

Plastic films have increased rapidly with the use in flat-panel displays, secondary cells, and electronic devices, to make such devices lighter, thinner, and denser. In the present study, the authors describe a new measuring system using an X-ray slit beam with 0.4 mm to measure the thickness of plastic films accurately. By using this system, it can be realized to drastically improve the accuracy for the measurement of plastic film thickness between 10 μm and 1000 μm with highly resolution, resulting in an accuracy of ±2.7% or less for approximately 60 μm thick film. And also, it can be find flaws with highly resolution in the plastic sheet.