Time-Varying Angular Rate Sensing for a MEMS Z-Axis Gyroscope

In this paper, both axes of a z-axis MEMS gyroscope are actively controlled to facilitate time-varying angular rate sensing. An off-line adaptive least-squares estimation strategy is first developed that accurately estimates the unknown model parameters. An estimation analysis is presented which proves that the model parameters are accurately estimated. An online active controller/observer is then developed for time-varying angular rate sensing. For this method, a nonlinear estimator is developed based on a Lyapunov-based analysis, which proves that the time-varying angular rate experienced by the device can be estimated accurately