Optimal FOM Designed Piezoelectric Microgenerator with Energy Harvesting in a Wide Vibration Bandwidth

This paper presents a novel micromechanised piezoelectric generator harvesting mechanical energy in a wide vibration bandwidth. Based on optimal figure of merit (FOM) and our developed scheme, the size of 3mm times 3mm times 5mm generator is composed of four connected-in-parallel cantilever structures, which are fabricated by an innovative process with the advantages of flexible membrane and minimized residual stress to achieve a large displacement. The designed generator is targeted at producing the power of microwatt to milliwatt in a reasonable wide mechanical vibration range (e.g. 300-800 Hz).