The Study of Flexible Plate Wave Device for Micro Pumping System

This paper investigates on micro pumping system, flow field generated by an traveling wave boundary layer, which model is developed for flexural plate wave (FPW) device numerically. In the study, the steady state solution of a FPW pump is most concerned. The velocity profiles and net flow rate for different parameters including frequency, channel height, and wave length are investigated. In this device, it is found that flow field remains periodic. The time averaged velocity profiles over one period become a parabolic velocity profile when the channel height is less than 100 mum. When a channel height is higher than 200jim, the time averaged velocity profiles deviate from parabolic velocity profile to a wall-jet type velocity profile. This finding is different from previous study. The acoustic pressure can influence as high as 100 Jim channel height. The pressure wave confinement effect in a microchannel with height less than 100 Jim is noticed. This research also finds that the flow rate of FPW pump can be controlled by the frequency.