A Micro Linear Motor with Integrated Passive Magnetic Guidance

This paper reports on a micro linear motor with integrated passive magnetic guidance and the differences when designing such linear motors using micro fabrication techniques like sputtering with respect to normal techniques like inserting fabricated coils into a magnetic yoke. The passive magnetic guidance could be integrated without the need of further components. Special rules resulting from the different materials and fabrication processes are discussed and analyzed using a finite element method. As a result of the rules, a linear stepping motor has been designed and fabricated. At the end, the results of thermal and force measurements of a fabricated micro motor are presented and show the usability of the actuator and the quality of the calculation tools