P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

Sensitivity and responsivity analysis is performed on a localized-mass sensor based on thin-film bulk acoustic resonator (FBAR), intended for bio-molecular applications. Three kinds of experiments have been carried-out, in order to test the influence of the contact area and electrode-location of the loading mass. Beginning from a first experiment in which the loading mass is a FIB-deposited squared-shaped composite of C/Pt/Ga as small as 1.5 times 1.5 mum
²
, through several experiments in which area and mass is changed, responsivities running from 10
^-19
g/Hz are achieved