P1J-2 Electromechanical Coupling Coefficient k15 and Crystallites Alignment of (1120) Textured ZnO Films

Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionally aligned ((112macr0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k
₁₅
of the (112macr0) textured ZnO films