Field-Emission Diode and Triode Structures Using Self-Assembled Silicon Nanostructure Cathodes

Field emission displays (FEDs) are one of the various technologies being developed for the flat-panel display market. Much recent work has centred on carbon-nanotube-patterned cathodes, however, and alternative technology that is compatible with conventional silicon CMOS processes would be desirable. Self-assembled silicon nanostructures are a possible alternative. Processes for forming diodes and triodes incorporating these nanostructures, along with electrical characterisation data, are presented in this paper.