Instrumentation Developments in Atom Probe Tomography

In this paper, recent trends in atom probe instrumentation were described. Also, examples of specific applications were provided. An aluminum field desorption image the demonstrates the wide field-of-view (FOV) capability of the recently developed atom probe detector was presented. The voltage pulsing and laser pulsing modes for metal and semiconductor materials were compared. The combination of pulsed laser atom probe and the expanded FOV facilitate the development of breakthrough applications in semiconductor materials such as dopant profile analysis were also shown