FEM Simulation and Characterization of Microcantilevers Resonators

This work has been focused on the design, simulation, fabrication and characterisation of cantilevers structures that include the excitation element and a bending sensor. Structures have been fabricated with different dimensions and geometries, its operation verified and their resonance frequency and quality factor (Q) measured. Device performance was compared with simulation predictions obtained using finite element analysis (FEA) with ANSYS. For example, structures with dimensions in the range of 200times150mum
²
to 400times300mum
²
shown the first mode of resonance frequency laid between 440 KHz and 90 KHz and the quality factor between 770 and 1100