Influence of the doping material on the benzene detection

In this paper we describe the fabrication of low-cost micro-hotplate benzene sensors by using screen-printing technology. Sensitive layers of tin and tungsten oxide (pure and doped with 1% in weight of Au, Pt and Pd) were deposited on silicon micromachined substrates with low thermal inertia. Gas measurements were performed with the fabricated sensors and the results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors